MEMS: Research, Papers and Researchers

01Research activity

MEMS research by ScholarsColab researchers

What researchers combine with MEMS

Words that appear most often in these paper titles. Tap one to see those papers.

Recent focus (2023 onwards): design, frequency, application, simulation, device, optimization.

02Researchers

PhD researchers working on MEMS

Every researcher below is registered on ScholarsColab and can be hired as a mentor or for a project. Publication counts are their papers on this topic.

Jacopo IannacciFondazione Bruno Kessler38 papers on this topic · 900 citationsDr. Kaustubh Kumar ShuklaAssociate Professor, Department of CSE, Dronacharya Group of Institutions, Greater Noida.16 papers on this topic · 32 citationsRama KomaragiriGalgotias University13 papers on this topic · 115 citationsDr. Richa MishraBirla Institute of Technology, Mesra, Ranchi6 papers on this topic · 5 citationsDr.K.UmapathiKalaignar karunanidhi Institute of Technology5 papers on this topic · 3 citationsMusa Adam Abdallah Ahmed AbdallahAssistant Professor Department of Mathematics, College of Computer Science and Information Technolog3 papers on this topic · 2 citationsMohanChitkara University2 papers on this topic · 7 citationsNTAMBARA BONIFACERwanda Polytechnic2 papers on this topic · 6 citationsDr. Girraj SharmaJECRC Foundation1 paper on this topic · 9 citationsDr. V. Gokula KrishnanProfessor, Department of Computer Science Engineering, Easwari Engineering College, Ramapuram, Chennai, Tamil…1 paper on this topic · 4 citationsDr.S.NatarajanMAGA Tech Gramam1 paper on this topic · 3 citationsHrishikesh DuttaInstitut Polytechnique de Paris1 paper on this topic · 3 citationsSayed A. NagyProfessor1 paper on this topic · 2 citationsDr. Shubhi JainSwami Keshvanand Institute of Technology1 paper on this topic · 0 citationsProf.Dr.R.UdayakumarDean Research , SRM UNIVERSITY1 paper on this topic · 0 citationsXinkun ChenXi'an Jiaotong UniversityLists MEMS as a research areaMohammad Reza GharibAssociate Professor, University of Torbat HeydariehLists MEMS as a research areaKiruthika Ramanykiruthika.ramany@gmail.comLists MEMS as a research area

03Papers

Research papers on MEMS

1. Internet of things (IoT); internet of everything (IoE); tactile internet; 5G–A (not so evanescent) unifying vision empowered by EH-MEMS (energy harvesting MEMS) and RF-MEMS …2018112 citationsSensors and Actuators A: PhysicalJacopo Iannacci
2. Reliability of MEMS: A perspective on failure mechanisms, improvement solutions and best practices at development level2015100 citationsDisplaysJacopo Iannacci
3. A flexible fabrication process for RF MEMS devices201165 citationsRomanian Journal of Information Science and TechnologyJacopo Iannacci
4. A general purpose reconfigurable MEMS-based attenuator for radio frequency and microwave applications200945 citationsJacopo Iannacci
5. A MEMS reconfigurable quad-band class-E power amplifier for GSM standard200943 citationsJacopo Iannacci
6. Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes201439 citationsMicrosystem TechnologiesJacopo Iannacci
7. The MEMS four-leaf clover wideband vibration energy harvesting device: design concept and experimental verification201638 citationsMicrosystem TechnologiesJacopo Iannacci
8. RF–MEMS wafer-level packaging using through-wafer interconnect200837 citationsSensors and Actuators A: PhysicalJacopo Iannacci
9. A MEMS-based wide-band multi-state power attenuator for radio frequency and microwave applications201031 citationsJacopo Iannacci
10. Influence of design and fabrication on RF performance of capacitive RF MEMS switches201628 citationsMicrosystem TechnologiesJacopo Iannacci
11. Optimization method for designing multimodal piezoelectric MEMS energy harvesters201628 citationsMicrosystem TechnologiesJacopo Iannacci
12. Thin film encapsulation for RF MEMS in 5G and modern telecommunication systems202023 citationsSensorsJacopo Iannacci
13. A novel MEMS-based piezoelectric multi-modal vibration energy harvester concept to power autonomous remote sensing nodes for Internet of Things (IoT) applications201522 citationsJacopo Iannacci
14. Dimension and doping concentration based noise and performance optimization of a piezoresistive MEMS pressure sensor201522 citationsMicrosystem TechnologiesRama Komaragiri
15. Compact modeling of a MEMS toggle-switch based on modified nodal analysis200521 citationsJacopo Iannacci
16. Investigation on better sensitive silicon based MEMS pressure sensor for high pressure measurement201321 citationsInternational Journal of Computer ApplicationsRama Komaragiri
17. Non-linear electromechanical RF model of a MEMS varactor based on veriloga© and lumped-element parasitic network200718 citationsJacopo Iannacci
18. Design of U-shaped frequency tunable microwave filters in MEMS technology202317 citationsSensorsJacopo Iannacci
19. Analysing the effects of temperature and doping concentration in silicon based MEMS piezoresistive pressure sensor201617 citationsProcedia computer scienceRama Komaragiri
20. New and efficient design of multimode piezoelectric vibration energy harvester for MEMS application202116 citationsMicrosystem TechnologiesJacopo Iannacci
21. A novel toggle-type MEMS vibration energy harvester for Internet of Things applications201616 citationsJacopo Iannacci
22. Introduction to MEMS and RF-MEMS: From the early days of microsystems to modern RF-MEMS passives201715 citationsJacopo Iannacci
23. The WEAF Mnecosystem: a perspective of MEMS/NEMS technologies as pillars of future 6G, tactile internet and super-IoT202114 citationsMicrosystem TechnologiesJacopo Iannacci
24. Multitone intermodulation and RF stability analysis of MEMS switching circuits by a globally convergent harmonic balance technique200514 citationsJacopo Iannacci
25. VLSI layout based design optimization of a piezoresistive MEMS pressure sensors using COMSOL201214 citationsRama Komaragiri
26. Wafer-level micropackaging in thin film technology for RF MEMS applications201813 citationsMicrosystem TechnologiesJacopo Iannacci
27. K‐band RF‐MEMS uniplanar reconfigurable‐bandwidth bandpass filter using multimodal immittance inverters201313 citationsElectronics LettersJacopo Iannacci
28. Fabrication and electromechanical modeling of a flexural-mode MEMS piezoelectric transformer in AlN201712 citationsJournal of Microelectromechanical SystemsJacopo Iannacci
29. A smart sensor using MEMS technology for artificial environmental monitoring202212 citationsDr. Kaustubh Kumar Shukla
30. A reconfigurable pseudohairpin filter based on MEMS switches202211 citationsSensorsJacopo Iannacci
31. A positive exploitation of ESD events: Micro-welding induction on ohmic MEMS contacts201111 citationsJacopo Iannacci
32. MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensing201810 citationsMicrosystem TechnologiesJacopo Iannacci
33. Up-scaled macro-device implementation of a MEMS wideband vibration piezoelectric energy harvester design concept201610 citationsMicrosystem TechnologiesJacopo Iannacci
34. RF MEMS technology for next-generation wireless communications201310 citationsJacopo Iannacci
35. The WEAF Mnecosystem (water, earth, air, fire micro/nano ecosystem): a perspective of micro/nanotechnologies as pillars of future 6G and tactile internet (with focus on MEMS)20219 citationsMicrosystem TechnologiesJacopo Iannacci
36. The WEAF mnecosystem: A perspective of MEMS/NEMS technologies as pillars of future 6G, super-IoT and tactile internet20219 citationsJacopo Iannacci
37. Broadband MST sensor probes based on a SP3T MEMs switch20199 citationsJacopo Iannacci
38. Mixed-domain fast simulation of RF and microwave MEMS-based complex networks within standard IC development frameworks20109 citationsJacopo Iannacci
39. Optimization and fabrication of MEMS based piezoelectric acoustic sensor for wide frequency range and high SPL acoustic application20239 citationsMicro and NanostructuresDr. Girraj Sharma
40. Optimized design of a silicon based MEMS pressure sensor for wider range and better sensitivity20138 citationsRama Komaragiri
41. RF MEMS switch optimization using ANN and design of antenna with frequency reconfigurability20257 citationsMicrosystem TechnologiesJacopo Iannacci
42. Contact modelling of RF MEMS switches based on FEM simulations20097 citationsJacopo Iannacci
43. Computer aided modeling for a miniature silicon-on-insulator MEMS piezoresistive pressure sensor20157 citationsPhotonic SensorsRama Komaragiri
44. Exploiting RF MEMS Switches for Pattern Reconfigurable Parasitic Antennas20216 citationsJacopo Iannacci
45. Study on the performance of tailored spring elements for piezoelectric MEMS energy harvesters20156 citationsJacopo Iannacci
46. Compact Modeling of RF‐MEMS Devices20136 citationsJacopo Iannacci
47. Investigation to improve reliableness for health monitoring in different environments using MEMS based higher sensitive microcantilever array20226 citationsDr. Kaustubh Kumar Shukla
48. MEMS Technology for Early Stage Diesis Detection Using Micro-Cantilever Structure in Support of Biomedical Applications20226 citationsECS TransactionsDr. Kaustubh Kumar Shukla
49. Performance optimization of MEMS capacitive accelerometer20145 citationsRama Komaragiri
50. Sensitivity enhancement of a silicon Based MEMS pressure sensor by optimization of size and position of piezoresistor20145 citationsRama Komaragiri
51. Optimized design of a stacked diaphragm MEMS pressure sensor for Tsunami warning system20135 citationsRama Komaragiri
52. MEMS-based transdermal drug delivery20235 citationsDr. Richa Mishra
53. Frequency Reconfigurable Microstrip Patch Antenna for Multiband Applications with Shunt-Series MEMS Switch20224 citationsInternational Journal on Recent and Innovation Trends in Computing and Dr. V. Gokula Krishnan
54. Effect of stacked Diaphragm in the MEMS Pressure Sensor for Oceanographic Applications20124 citationsRama Komaragiri
55. Study and Analysis of MEMS based Micro-Cantilever Sensor and its Medical Applications20194 citationsJournal of Applied Science and ComputationsDr. Kaustubh Kumar Shukla
56. Design of MEMS Based Micro Cantilever20194 citationsDr. Kaustubh Kumar Shukla
57. Influence of current density on the physical properties of electroplated NiFeP nano thin films for MEMS applications20214 citationsJournal of Materials Science: Materials in ElectronicsMohan
58. Multiphysics and Simulation of MEMS Based Bolometer for Detecting the Radiations in Nuclear Power Plants20123 citationsDr.K.Umapathi
59. Multimode TED-tuned beam mass damper for low-g capacitive MEMS accelerometers VRE reduction20243 citationsJournal Of Vibration And ControlNTAMBARA BONIFACE
60. Probing multimode thermoelastic damping in MEMS beam mass structure20243 citationsJournal of Vibration Engineering and TechnologiesNTAMBARA BONIFACE
61. Analysis of diaphragm geometries for mems based pressure sensors3 citationsRama Komaragiri
62. RASPBERRY PI-BASED SENSOR NETWORK FOR MULTI-PURPOSE NONLINEAR MOTION DETECTION IN LABORATORIES USING MEMS20223 citationsMomentoDr.S.Natarajan
63. Design and analysis of perforated MEMS resonator20213 citationsMicrosystem TechnologiesHrishikesh Dutta
64. Preparation of bath temperature controlled NiFeP films for MEMS application20223 citationsSolid State CommunicationsMohan
65. Temperature study of reinforced MEMS Pressure sensor20132 citationsRama Komaragiri
66. Feasibility study of AC bridges in MEMS pressure sensors20122 citationsRama Komaragiri
67. MEMS gyroscope for attitude propagation and determination for nanosatellites20172 citationsSayed A. Nagy
68. Simulation and Mathematical model of MEMS Actuator System with MATLAB20231 citationsMusa Adam Abdallah Ahmed Abdallah
69. Design and Evaluation of Control Algorithms for MEMS Devices in MATLAB/Simulink20231 citationsEuropean Journal of Mathematics and StatisticsMusa Adam Abdallah Ahmed Abdallah
70. Acoustic detection of Callosobruchus maculatus (F.) (Coleoptera: Chrysomelidae) in green gram and cowpea using MEMS microphone system20250 citationsJournal of Plant Diseases and ProtectionDr.K.Umapathi
71. Multiphysics Modeling and Simulation of Implantable Wireless MEMS Capacitive Sensor for Cardiovascular Diagnostics0 citationsDr.K.Umapathi
72. Multiphysics Modeling and Simulation of MEMS based Thermal Bimorph Sensor Array for Automated Solar Energy Storage Applications0 citationsDr.K.Umapathi
73. Multiphysics Modeling and Simulation of MEMS Based Variometer for Detecting the Vertical Speed of Aircraft in Avionics Applications0 citationsDr.K.Umapathi
74. State Space Equations and Simulation of MEMS Electrostatic Actuator to Equivalent Circuit20230 citationsMusa Adam Abdallah Ahmed Abdallah
75. Reconfigurable RF MEMS PIFA Antenna: A Review Study0 citationsDr. Shubhi Jain
76. Comparative Study of MEMS Microheaters Using Distinct Designs and Materials for PCR Applications20250 citationsDr. Richa Mishra
77. Design and Simulation of MEMS based Cascaded Structure Electroosmotic Micropump20240 citationsDr. Richa Mishra
78. Chapter 16 - MEMS based Hollow microneedles for Transdermal Drug Delivery20200 citationsDr. Richa Mishra
79. Investigation of Si-C-N Multilayer (Hard and Soft) coating as potential Candidate for Si-C-N MEMS fabrication20130 citationsDr. Richa Mishra
80. Finite element analysis of MEMS pressure sensors intended for Subsonic Wind Tunnel Applications0 citationsDr. Richa Mishra
81. Progressive Design and Assessment of MEMS-Based Devices for Healthcare and Computer Science Applications20250 citationsCuestiones de FisioterapiaDr. Kaustubh Kumar Shukla
82. Design and Performance Analysis of MEMS based Device for Environmental Monitoring and Healthcare20230 citationsDr. Kaustubh Kumar Shukla
83. Deployment of A MEMS-based System for Detecting Health-Related Environmental Variables and Measuring Intracranial Pressure20220 citationsIndian Journal of Natural SciencesDr. Kaustubh Kumar Shukla
84. Optimization of MEMS Pressure Sensor for Biomedical Applications20210 citationsDr. Kaustubh Kumar Shukla
85. MEMS based Sensor for Location Tracking and Monitoring Process20210 citationsDr. Kaustubh Kumar Shukla
86. MEMS Based Gesture Controlled Robot Using Wireless Communication20200 citationsDr. Kaustubh Kumar Shukla
87. 3-D Complex Structural Modifications to Obtain Utmost Sensitivity Using MEMS Technology20200 citationsAdvanced Science LettersDr. Kaustubh Kumar Shukla
88. Adoption of Semiconductor Materials in Support of MEMS Technology20200 citationsDr. Kaustubh Kumar Shukla
89. AI-Enhanced MEMS Monitoring System for Health & Environment20150 citationsDr. Kaustubh Kumar Shukla
90. Smart MEMS Sensors with Artificial Intelligence for Continuous Healthcare and Environmental Quality Monitoring20150 citationsDr. Kaustubh Kumar Shukla
91. Inventiveness and Estimation of MEMS Constructed Appliance for Healthcare and Ecological Intensive Care0 citationsDr. Kaustubh Kumar Shukla
92. Efficient Pc Controlled By Hand Movement Using Mems Sensor Mouse20120 citationsIndian Journal of Science and TechnologyProf.Dr.R.Udayakumar

04Journals

Journals that publish MEMS research

Where our researchers published their papers on this topic, with each journal’s indexing.

*Impact factor and quartile calculated from OpenAlex open data where available; official Journal Impact Factors are published by Clarivate. Indexing from the SCIE, SSCI, AHCI, ESCI, Scopus and JCR 2024 lists. Find the right journal for your own paper →

05Top 2% scientists

World’s Top 2% scientists in Networking & Telecommunications

The Stanford/Elsevier World’s Top 2% Scientists list ranks researchers by a composite citation indicator. Networking & Telecommunications is the research subfield closest to MEMS in that list; 4,818 researchers from 75 countries are listed in it.

Source: Elsevier Data Repository, Ioannidis et al., 2026 edition, citations to the end of 2025 (career-long ranking). ScholarsColab is not affiliated with Stanford University or Elsevier, and the researchers listed are not ScholarsColab mentors unless marked so above.

06Related topics

Topics related to MEMS

Topics that share the most papers with MEMS in our researchers’ work:

• NEMS3 papers · 4 researchers
• Accelerometer11 papers · 6 researchers
• Microwave121 papers · 38 researchers
• Thin Film136 papers · 33 researchers
• Energy Harvesting65 papers · 33 researchers
• Drug Delivery77 papers · 40 researchers
• Wireless Communication79 papers · 45 researchers
• Healthcare445 papers · 205 researchers
• Antenna680 papers · 66 researchers
• Internet of Things (IoT)1,334 papers · 356 researchers

07Questions

Frequently asked questions